Polymers as materials in microengineering
On the basis of literature review for the period of 1988—1993, the manufacturing methods and applications of polymeric parts in microdevices comprising micrometer-sized elements are discussed. Some new investigation methods, a.o. with the use of Atomic Force Microscope, are described and the properties, in particular tribological properties, of polymeric microelements and elements used in nanotechnological devices are discussed. A detailed discussion of the results of studies on the metrological characteristics of guides with sliding elements made of polyacetal resin and polytetrafluoroethylene is presented.
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